CMOS and memories: From 100 nm to 10 nm!
- Sandip Tiwari
- Paul M. Solomon
- et al.
- 1999
- Microelectronic Engineering
Publications
Date
Featured collections
Popular topics
221 results at Microelectronic Engineering
Ultrahigh density, high-data-rate NEMS-based AFM data storage system
- P. Vettiger
- J. Brugger
- et al.
- 1999
- Microelectronic Engineering
Manipulation of carbon nanotubes and properties of nanotube field-effect transistors and rings
- H.R. Shea
- R. Martel
- et al.
- 1999
- Microelectronic Engineering
Development of APSM resists for sub-200 nm contact holes
- M. Rajaratnam
- M. Reilly
- et al.
- 1999
- Microelectronic Engineering
Oxide scaling limit for future logic and memory technology
- J.H. Stathis
- D.J. DiMaria
- 1999
- Microelectronic Engineering
Hot Electron Emission Lithography: A method for efficient large area e-beam projection
- M. Poppeller
- E. Cartier
- et al.
- 1999
- Microelectronic Engineering
Supposed universality of 1/3 shot noise reduction
- Rolf Landauer
- 1999
- Microelectronic Engineering
Ultrathin nitrided gate dielectrics by plasma-assisted processing
- E. Gusev
- D.A. Buchanan
- et al.
- 1999
- Microelectronic Engineering
Nanoengineering beyond nanoelectronics
- H. Rohrer
- 1998
- Microelectronic Engineering
Lithographic evaluation of a DUV carbon attenuated phase shift mask
- A.C. Callegan
- K. Babich
- et al.
- 1998
- Microelectronic Engineering