Integrating nanotechnology into a working storage device
- A.W. Knoll
- P. Bächtold
- et al.
- 2006
- Microelectronic Engineering
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221 results at Microelectronic Engineering
Detection of open or closed porosity in low-κ dielectrics by solvent diffusion
- Marcus A. Worsley
- Mark Roberts
- et al.
- 2005
- Microelectronic Engineering
Ramifications of lubrication theory on imprint lithography
- Matthew Colburn
- Byung Jin Choi
- et al.
- 2004
- Microelectronic Engineering
Reliability of MOS devices with tungsten gates
- F. Palumbo
- S. Lombardo
- et al.
- 2004
- Microelectronic Engineering
Nanocomposite resist systems for next generation lithography
- L. Merhari
- K.E. Gonsalves
- et al.
- 2002
- Microelectronic Engineering
A 10 nm MOSFET concept
- J. Appenzeller
- R. Martel
- et al.
- 2001
- Microelectronic Engineering
Contrast mechanisms in high-resolution contact lithography: A comparative study
- Michael Paulus
- Heinz Schmid
- et al.
- 2001
- Microelectronic Engineering
Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications
- H. Rothuizen
- U. Drechsler
- et al.
- 2000
- Microelectronic Engineering
Aluminum dual damascene metallization for 0.175 μm DRAM generations and beyond
- R.F. Schnabel
- L. Clevenger
- et al.
- 2000
- Microelectronic Engineering
Ion projection lithography for resistless patterning of thin magnetic films
- W. Bruenger
- M. Torkler
- et al.
- 2000
- Microelectronic Engineering