A Novel Borderless Contact/Interconnect Technology Using Aluminum Oxide Etch Stop for High Performance SRAM and Logic
- S. Subbanna
- D.L. Harame
- et al.
- 1993
- IEDM 1993
Conference paper
Publications
14468 results for Physical Sciences
High Performance 0.1 μm CMOS Devices with 1.5 V Power Supply
- Y. Taur
- S.J. Wind
- et al.
- 1993
- IEDM 1993
Conference paperHigh transconductance n- and p-channel GaAs MESFETs using novel amphipolar Cu3Ge ohmic contacts
- C.L. Lin
- M.O. Aboelfotoh
- et al.
- 1993
- IEDM 1993
Conference paperVertical Profile Optimization of Very High Frequency Epitaxial Si- and SiGe-Base Bipolar Transistors
- E.F. Crabbé
- B.S. Meyerson
- et al.
- 1993
- IEDM 1993
Conference paperA DUAL DAMASCENE HARD METAL CAPPED CU AND AL-ALLOY FOR INTERCONNECT WIRING OF ULSI CIRCUITS
- H. Dalai
- R.V. Joshi
- et al.
- 1993
- IEDM 1993
Conference paperA 0.6 µm2 256Mb Trench DRAM Cell with Self-Aligned Buried Strap (BEST)
- L.A. Nesbit
- J. Alsmeier
- et al.
- 1993
- IEDM 1993
Conference paperDefects in amorphous hydrogenated silicon nitride films
- Jerzy Kanicki
- W.L. Warren
- 1993
- Journal of Non-Crystalline Solids
PaperPhoton emission from adsorbed C60 molecules with sub-nanometer lateral resolution
- R. Berndt
- R. Gaisch
- et al.
- 1993
- Applied Physics A Solids and Surfaces
PaperPrecipitation of arsenic in doped GaAs
- C.L. Chang
- K. Mahalingam
- et al.
- 1993
- Journal of Electronic Materials
PaperStructural effects on the magnetic properties of FePd and FeRh
- V.L. Moruzzi
- P.M. Marcus
- 1993
- Physical Review B
Paper