Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
In this paper we review the structural identification and electronic properties of the K- and N-centers, and positive charges in as-deposited and UV-illuminated amorphous silicon nitride thin films. © 1993.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Sung Ho Kim, Oun-Ho Park, et al.
Small
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials