Publications

3541 results for Mathematical Sciences

Pattern collapse mitigation strategies for EUV Lithography
- - Dario L. Goldfarb
  - Robert L. Bruce
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Process optimization through model based SRAF printing prediction
- - Ramya Viswanathan
  - Jaione Tirapu Azpiroz
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Lens heating challenges for negative tone develop layers with freeform illumination: A comparative study of experimental vs. simulated results
- - Scott Halle
  - Michael Crouse
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Computing exact Fourier series coefficients of IC rectilinear polygons from low-resolution fast Fourier coefficients
- - Robin Scheibler
  - Paul Hurley
- 2012
- SPIE Advanced Lithography 2012
EUV mask line edge roughness
- - Amy E. Zweber
  - Emily Gallagher
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Fast source independent estimation of lithographic difficulty supporting large scale source optimization
- - David Demaris
  - Maria Gabrani
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Trainable convolution filters and their application to face recognition
- - Ritwik Kumar
  - Arunava Banerjee
  - et al.
- 2012
- IEEE TPAMI
High order wafer alignment in manufacturing
- - Michael Pike
  - Nelson Felix
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Conductive layer for charge dissipation during electron-beam exposures
- - Luisa D. Bozano
  - Ratnam Sooriyakumaran
  - et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Investigation of pattern wiggling for spin-on organic hardmask materials
- - Goji Wakamatsu
  - Kentaro Goto
  - et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012