Electron Resists for Microcircuit Fabrication
- M. Haizakis
- 1968
- IEEE T-ED
Paper
Publications
465 results at IEEE T-ED
Multilayer At03-Si02Combination (MASC) Films as a Partial H2 Diffusion Barrier for Use on Ge Surfaces
- Thomas O. Sedgwick
- Joseph A. Aboaf
- 1968
- IEEE T-ED
PaperA Reduction Camera for Exposure of Microcircuitry onto Wafers
- J.S. Wilc
- R.E. Tibbetts
- et al.
- 1968
- IEEE T-ED
PaperUltra-High-Speed Planar Germanium Transistors and Integrated Circuits
- H.N. Yu
- F.H. Dill
- 1968
- IEEE T-ED
PaperLow- Low-Temperature Optical Beam-Ad-dressable Memory
- G.Y. Fan
- J.H. Greiner
- 1968
- IEEE T-ED
PaperOn the Shape of Traveling Domains in Gallium Arsenide
- J.B. Gunn
- 1967
- IEEE T-ED
PaperMicrowave Deflection of Electron Beams
- C.C.T. Wang
- 1967
- IEEE T-ED
PaperTheory of Avalanche Breakdown in InSb and InAs
- W.P. Dumke
- 1967
- IEEE T-ED
PaperComputer Calculation of Deflection Aberrations in Electron Beams
- Carl C.T. Wang
- 1967
- IEEE T-ED
PaperThe Pressure Dependence of Barrier Heights in Ge-GaAs n-n Heterojunctions
- W.E. Howard
- A.B. Fowler
- et al.
- 1967
- IEEE T-ED
Paper