Summary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bonding
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: Metal-induced impurity states at the inP/transition-metal interface
- F. Schaffler
- W. Drube
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAdvances in vacuum contamination control for electronic materials processing
- John F. O'Hanlon
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: In situ surface and interface magnetic characterization of thin films
- Eric Kay
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary abstract: Properties of hydrocarbon polymer films containing metal clusters
- Christian Laurent
- Eric Kay
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperReactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- Gottiieb S. Oehrlein
- Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperElectrical properties of vacuum annealed Si surfaces
- J. Werner
- M. Renier
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers
- M. Liehr
- S. Gates
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperPhotoemission study of Cd loss and its effect on the electronic structure of etched Hg1-xCdxTe surfaces
- G.P. Carey
- A.K. Wahi
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEffect of energetic neutralized noble gas ions on the structure of ion beam sputtered thin metal films
- E. Kay
- F. Parmigiani
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper