Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
No abstract available.
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
John G. Long, Peter C. Searson, et al.
JES
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009