Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
Paper
Summary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers
Abstract
No abstract available.
Related
Hiroshi Ito, Reinhold Schwalm
JES
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP