Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
01 Jul 1987

Summary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers

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Abstract

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Date

01 Jul 1987

Publication

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Authors

  • M. Liehr
  • S. Gates
  • J. O'Sullivan
  • G.W. Rubloff
  • B.A. Meyerson
IBM-affiliated at time of publication

Topics

  • Physical Sciences
  • Materials Discovery

Resources

  • Publication

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