Advances in vacuum contamination control for electronic materials processing
- John F. O'Hanlon
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- Gottiieb S. Oehrlein
- Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Near edge x-ray absorption fine-structure studies of molecules and molecular chains bonded to surfaces
- J. Støhr
- D.A. Outka
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- M. Liehr
- J.E. Lewis
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electronically excited photodissociation and desorption of molecules on surfaces
- T.J. Chuang
- K. Domen
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Imaging electronic surface states in real space on the Si(111) 2x1 surface
- Joseph A Stroscio
- R.M. Feenstra
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: Local bonding and stability of the excited and ionic states of chernisorbed CO and NO
- Ph. Avouris
- P.S. Bagus
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of Au film on the kinetics of platinum silicide formation
- Jerng-Sik Song
- Chin-An Chang
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: Properties of hydrocarbon polymer films containing metal clusters
- Christian Laurent
- Eric Kay
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films