Kinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- M. Liehr
- J.E. Lewis
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Imaging electronic surface states in real space on the Si(111) 2x1 surface
- Joseph A Stroscio
- R.M. Feenstra
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: Transmission electron microscopy studies of the microstructure of AuNiGe ohmic contact to n-type GaAs
- Yih-Cheng Shih
- E.L. Wilkie
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: Chernisorption of silanes on the Si(111)-(7x7) surface
- S. Gates
- B.A. Scott
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: Materials and physics issues in scaling bipolar devices
- T.H. Ningtak
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary abstract: The low-temperature reactivity of Si(100) with NH3 and NO: Rate determining steps and rate enhancement via electronic excitations
- F. Bozso
- Ph. Avouris
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperRadio frequency sputter deposition of si02 films at high rate
- J.S. Logar
- F. Jones
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCharge transport in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperX-ray photoelectron and infrared spectroscopy of microwave plasma etched polyimide surfaces
- N.J. Chou
- J. Paraszczak
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDynamics of gas-surface energy transfer: Inelastic scattering of NO from Ag(111)
- C.T. Rettner
- J. Kimman
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper