Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Paper

01 Jul 1987

Pressure and plasma effects on the properties of magnetron sputtered carbon films

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Abstract

No abstract available.

Paper

Thermally Developable, Positive Resist Systems with High Sensitivity

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JES

Conference paper

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EMC 2001

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Scanning tunneling microscopy and spectroscopy of thin metal films on the GaAs(110) surface

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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Light-coupling masks: An alternative, lensless approach to high-resolution optical contact lithography

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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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