E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989