William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
J.Z. Sun
Journal of Applied Physics