Summary abstract: Time-resolved study of oxygen reaction on si(100) surfaces using pulsed molecular beam reactive scattering

L.K. Wang, A. Acovic, et al.

MRS Spring Meeting 1993

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008

Q.R. Huang, Ho-Cheol Kim, et al.

Macromolecules

J.C. Marinace

JES