Contrast enhanced UV lithography with polysilanes
- Donald C. Hofer
- Robert D. Miller
- et al.
- 1984
- Microlithography 1984
Publications
3594 results for Mathematical Sciences
Effect of developer composition on photoresist performance
- William D. Hinsberg
- Monica L. Gutierrez
- 1989
- Proceedings of SPIE 1989
Polysilane Bilayer UV Lithography
- Donald C. Hofer
- Robert D. Miller
- et al.
- 1989
- Proceedings of SPIE 1989
A 50 to 400 mbit/sec single chip fiber optic receiver circuit
- Dennis L. Rogers
- Albert X. Widmer
- et al.
- 1989
- Proceedings of SPIE 1989
Characterization of semiconductor silicon by transmission electron microscopy
- Teh Y. Tan
- 1989
- Proceedings of SPIE 1989
Nuclear profiling of aluminum in GaAlAs/GaAs heterostructures
- A. Bond
- P. Parayanthal
- et al.
- 1983
- Cambridge Symposium 1983
Elemental and electronic characterization of semiconductor materials with the STEM
- P.E. Batson
- 1989
- Proceedings of SPIE 1989
Possibilities for the study of blood platelets using soft x-ray microscopy
- Mario G. Baldini
- B.K. Kim
- et al.
- 1989
- Proceedings of SPIE 1989
On the possibility of measuring the diffraction pattern of single micro objects
- D. Sayre
- R.P. Haelbich
- et al.
- 1989
- Proceedings of SPIE 1989
Performance of multilayer dispersion elements from 80 to 500 ev
- R.J. Bartlett
- D.R. Kania
- et al.
- 1989
- Proceedings of SPIE 1989