Jayaram Krisinaswamy, Lumin Li, et al.
Proceedings of SPIE 1989
Conference paper
Maskless laser plating techniques for microelectronic materials
Abstract
We describe techniques for laser enhanced plating of gold, nickel and copper. This maskless plating results in speeds up to 10 times that of conventional plating. Mechanisms and applications are discussed. © 1983 SPIE.
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