Barrier Layers: Principles and applications in microelectronics
- Marc Wittmer
- 1984
- JVSTA
Publications
Date
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- Materials Discovery
3434 results for Materials Discovery
Grain structure variation with temperature for evaporated metal films
- H.T.G. Hentzell
- C.R.M. Grovenor
- et al.
- 1984
- JVSTA
Geometric structure and electronic states of copper films on a ruthenium (0001) surface
- J.C. Vickerman
- K. Christmann
- et al.
- 1983
- Surface Science
Transmission electron microscopy for optical storage material analysis
- S.R. Herd
- K.Y. Ahn
- 1983
- Thin Solid Films
The stability of thin tellurium and tellurium alloy films for optical data storage: II
- Wen-Yaung Lee
- 1983
- Thin Solid Films
Fabrication and testing of trilayers with a high deposition rate plasma-polymerized spacer
- N.J. Mazzeo
- K.Y. Ahn
- et al.
- 1983
- Thin Solid Films
Depletion and retention of fluid on a rotating disk
- Yih-O. Tu
- 1983
- Journal of Tribology
Characterization of plasma-deposited organosilicon thin films
- Krishna G. Sachdev
- Harbans S. Sachdev
- 1983
- Thin Solid Films
Silicide contacts for shallow junction devices
- Marc Wittmer
- 1983
- Thin Solid Films
Investigation of Tin films reactively sputtered using a sputter gun
- K.Y. Ahn
- M. Wittmer
- et al.
- 1983
- Thin Solid Films