A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Paper
Summary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar system
Abstract
No abstract available.
Related
David B. Mitzi
Journal of Materials Chemistry
Peter J. Price
Surface Science
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020