Photoresist technology for 0.25 μm lithography
- Will Conley
- 1991
- Single Frequency Semiconductor Lasers 1991
Conference paper
Publications
3602 results for Mathematical Sciences
Resist patterning for sub-quarter-micrometer device fabrications (Invited Paper)
- K. Chiong
- F.J. Hohn
- 1990
- Microlithography 1990
Conference paperAccurate full-wave approach for modeling patch antennas
- Barry J. Rubin
- R.A. York
- et al.
- 1990
- International Conference on Infrared and Millimeter Waves 1990
Conference paperFull-wave analysis of counectors in high-speed computer packages
- Moises Cases
- Barry J. Rubin
- 1990
- International Conference on Infrared and Millimeter Waves 1990
Conference paperInterpolation by sums of radial functions
- Nira Dyn
- Charles A. Micchelli
- 1990
- Numerische Mathematik
PaperOrganic nonlinear optical materials and their device applications for frequency doubling, modulation, and switching
- J.D. Swalen
- G.C. Bjorklund
- et al.
- 1990
- Optical and Optoelectronic Applied Science and Engineering 1990
Conference paperQuantitative measures for surface texture description in semiconductor wafer inspection
- A.Ravishankar Rao
- Ramesh Jain
- 1990
- Microlithography 1990
Conference paperStepper self-metrology using automated techniques
- T.A. Brunner
- J.M. Lewis
- et al.
- 1990
- Microlithography 1990
Conference paperShape perception and low-dimension fractal boundary contours
- Bernice E. Rogowitz
- R.F. Voss
- 1990
- Electronic Imaging: Advanced Devices and Systems 1990
Conference paperSimulation and regression: Dealing with the assumption of a common error variance
- P.D. Welch
- 1990
- WSC 1990
Conference paper