Effects of beam, target and substrate potentials in ion beam processing
- J.M.E. Harper
- 1982
- Thin Solid Films
Paper
Publications
310 results at Thin Solid Films
Preparation of Pb-Bi film by alloy evaporation I: Film composition control
- H.-C.W. Huang
- B.L. Gilbert
- 1982
- Thin Solid Films
PaperTracer diffusion in amorphous Pd80Si20 and Gd16Co84 films
- D. Gupta
- K.N. Tu
- et al.
- 1982
- Thin Solid Films
PaperLow temperature doping of arsenic atoms in silicon during Pd2Si formation
- I. Ohdomari
- K. Suguro
- et al.
- 1982
- Thin Solid Films
PaperElectronic states and microstructure at the silicide-silicon interface
- P.S. Ho
- G.W. Rubloff
- 1982
- Thin Solid Films
PaperStrain relaxation mechanisms of lead and lead alloy thin films on silicon substrates
- Masanori Murakami
- Tung-Sheng Kuan
- et al.
- 1982
- Thin Solid Films
PaperA computer calculation of step coverage in SiO thin films
- G.R. Proto
- I.A. Blech
- et al.
- 1982
- Thin Solid Films
PaperThe electronic structure of impurities and defects in SiO2
- Sokrates T. Pantelides
- 1982
- Thin Solid Films
PaperR.F. Sputtering of LiNbO3 thin films
- G.H. Hewig
- K. Jain
- et al.
- 1982
- Thin Solid Films
PaperOptical optimization of line deletion and personalization parameters on polymide films
- P.B. Perry
- S.K. Ray
- et al.
- 1981
- Thin Solid Films
Paper