A computer calculation of step coverage in SiO thin films

Paper

12 Mar 1982

Abstract

No abstract available.

Paper

Shiyi Chen, Daniel Martínez, et al.

Physics of Fluids

Paper

M.A. Lutz, R.M. Feenstra, et al.

Surface Science

Conference paper

S. Cohen, J.C. Liu, et al.

MRS Spring Meeting 1999

Review

David B. Mitzi

Journal of Materials Chemistry