Fluorination of the silicon dioxide surface during reactive ion and plasma etching in halocarbon plasmas
- S.W. Robey
- G.S. Oehrlein
- 1989
- Surface Science
Publications
Date
Featured collections
Popular topics
546 results at Surface Science
Chemical effects of Ne+ bombardment on the MoS2(0001) surface studied by high-resolution photoelectron spectroscopy
- Jeffrey R. Lince
- Thomas B. Stewart
- et al.
- 1989
- Surface Science
Structural properties of epitaxial films of Fe on Cu and Cu-based surface and bulk alloys
- S.H. Lu
- J. Quinn
- et al.
- 1989
- Surface Science
Direct measurement of forces during scanning tunneling microscope imaging of graphite
- C.Mathew Mate
- Ragnar Erlandsson
- et al.
- 1989
- Surface Science
He and Ne diffraction from W(100): Two views of the c(2 × 2) phase transition
- E. Schweizer
- C.T. Rettner
- 1989
- Surface Science
Silicon hydride etch products from the reaction of atomic hydrogen with Si(100)
- Stephen M. Gates
- Roderick R. Kunz
- et al.
- 1989
- Surface Science
The interaction of CF3 radicals and CF3 radical precursors with SiO2 surfaces
- F.R. McFeely
- J.A. Yarmoff
- et al.
- 1988
- Surface Science
An evaluation of surface roughness of very thin gold films observed by transmission electron microscopy
- William Krakow
- 1988
- Surface Science
Proof of the ionic character of the interaction of K with Si(100): A cluster model study
- Paul S. Bagus
- Inder P. Batra
- 1988
- Surface Science
Gas-surface scattering from W(100): Kinetic energy dependence of the effective corrugation
- C.T. Rettner
- E. Schweizer
- 1988
- Surface Science