Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The normal force acting on a scanning tunneling microscope tip while imaging a graphite surface in air has been measured directly. Forces in the range of 10-7 to 10-6 N are required to achieve tunneling. Further, the force needed to maintain a constant current varies considerably as the tip scans from one part of the graphite unit cell to another. Our results are consistent with a model, originally suggested by Mamin et al., in which the force between the tip and the surface is mediated by a contamination layer, and tunneling occurs at the end of an asperity which pierces this layer. However, we cannot rule out a model where a graphite flake is dragged across the graphite surface to generate an STM image. © 1989.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
M.A. Lutz, R.M. Feenstra, et al.
Surface Science