Publications

2347 results at Applied Physics Letters

Study of silicon contamination and near-surface damage caused by CF ₄/H₂ reactive ion etching
- - G.S. Oehrlein
  - R.M. Tromp
  - et al.
- 1984
- Applied Physics Letters
Exact description and data fitting of ion-implanted dopant profile evolution during annealing
- - R. Ghez
  - G.S. Oehrlein
  - et al.
- 1984
- Applied Physics Letters
Reduction of electron and hole trapping in SiO₂ by rapid thermal annealing
- - Z.A. Weinberg
  - D.R. Young
  - et al.
- 1984
- Applied Physics Letters
Outdiffusion of Si through gold films: The effects of Si orientation, gold deposition techniques and rates, and annealing ambients
- - Chin-An Chang
  - G. Ottaviani
- 1984
- Applied Physics Letters
Metal-amorphous silicon-silicon tunnel rectifier
- - E.S. Yang
  - Q.H. Hua
  - et al.
- 1984
- Applied Physics Letters
Optical stethoscopy: Image recording with resolution λ/20
- - D. Pohl
  - W. Denk
  - et al.
- 1984
- Applied Physics Letters
Rapid thermal annealing of boron-implanted silicon using an ultrahigh power arc lamp
- - R.T. Hodgson
  - V.R. Deline
  - et al.
- 1984
- Applied Physics Letters
Measurement of small elastic anisotropy in solids using laser-induced ultrasonic pulses
- - A.C. Tam
  - W.P. Leung
- 1984
- Applied Physics Letters
Interaction in Cu/Al and Pt/Cu/Al thin films: Competing oxygen effects and preferential reaction between Pt and CuAl alloy
- - Chin-An Chang
- 1984
- Applied Physics Letters
Emission spectra, surface quality, and mechanism of excimer laser etching of polyimide films
- - G. Koren
  - J.T.C. Yeh
- 1984
- Applied Physics Letters