Mechanism of microwave plasma etching of polyimides in O2 and CF4 gas mixtures
- N.J. Chou
- J. Parazsczak
- et al.
- 1986
- Microelectronic Engineering
Paper
Publications
24844 results for Exploratory Science
Summary Abstract: Reactive ion-etching-related Si surface residues and subsurface disorder
- G.S. Oehrlein
- J.G. Clabes
- et al.
- 1986
- JVSTA
PaperALPHABETIC MINIMAX TREES OF DEGREE AT MOST t.
- D. Coppersmith
- M.M. Klawe
- et al.
- 1986
- SIAM Journal on Computing
PaperItinerant theory of localized magnetism
- J. Kübler
- A.R. Williams
- 1986
- Journal of Magnetism and Magnetic Materials
PaperCharacterization of nitrogen-containing glasses by x-ray photoelectron spectroscopy
- G.H. Frischat
- R. Fern
- 1986
- JVSTA
PaperOptimal replacement policy for multicomponent systems: An application to a dairy herd
- Yaron Ben-Ari
- Shmuel Gal
- 1986
- EJOR
PaperSummary Abstract: Classical trajectory calculations of photon-stimulated desorption of ions from alkali-halides
- R.E. Walkup
- Ph. Avouris
- 1986
- JVSTA
PaperREPRESENTATION OF MELODY PATTERNS USING TOPOGRAPHIC SPECTRAL DISTRIBUTION FUNCTIONS.
- Clifford A. Pickover
- 1986
- Computer Music Journal
PaperEnergy and time-resolved photoemission in a promising new approach for contactless integrated-circuit testing
- H.K. Seitz
- A. Blacha
- et al.
- 1986
- Microelectronic Engineering
PaperReply to a commentary letter of Krigbaum
- Anagnostis E. Zachariades
- P. Navard
- 1986
- Molecular crystals and liquid crystals
Paper