Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
Paper
Summary Abstract: Reactive ion-etching-related Si surface residues and subsurface disorder
Abstract
No abstract available.
Related
Conference paper
Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Robert W. Keyes
Physical Review B