J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Paper
Summary Abstract: Classical trajectory calculations of photon-stimulated desorption of ions from alkali-halides
Related
K.N. Tu
Materials Science and Engineering: A
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, M.B. Small
JES