Optimization of Cu damascene electrodeposition process in ULSI for yield and reliability improvement
- Ingrid Shao
- T. Cheng
- et al.
- 2013
- ECS Transactions
Conference paper
Publications
33 results at ECS Transactions
Stress characterization of tungsten-filled through silicon via arrays using very high resolution multi-wavelength raman spectroscopy
- Jeff Gambino
- Daniel Vanslette
- et al.
- 2011
- ECS Transactions
Conference paperStrain engineering for fully-depleted SOI devices
- Ali Khakifirooz
- Pranita Kulkarni
- et al.
- 2010
- ECS Transactions
Conference paperOxygen transport in high-κ/ metal gate stacks and physical characterization by SIMS using isotope labeled oxygen
- Marinus Hopstaken
- John Bruley
- et al.
- 2010
- ECS Transactions
Conference paperLow-temperature epitaxial growth of Si, SiGe, Ge, and SiC in a 300mm UHV/CVD reactor
- Thomas N. Adam
- Stephen W. Bedell
- et al.
- 2010
- ECS Transactions
Conference paperThe role of oxygen in the development of Hf-base high-k/metal gate stacks for CMOS technologies
- E. Cartier
- 2010
- ECS Transactions
Conference paperIII-V photovoltaics - Recent developments and prospects
- N. Sosa
- Theodore G. Van Kessel
- et al.
- 2010
- ECS Transactions
Conference paperHigh-κ gate dielectrics for nanoscale CMOS devices: Status, challenges, and future
- Dae-Gyu Park
- Xinlin Wang
- 2010
- ECS Transactions
Conference paperInvestigation of band gap, band alignment and bonding states of the (TbxSc1-x)2O3/ Si system
- I. Geppert
- M. Eizenberg
- et al.
- 2010
- ECS Transactions
Conference paperIntegration of Germanium avalanche photodetectors on silicon for on-chip optical interconnects
- Solomon Assefa
- Fengnian Xia
- et al.
- 2010
- ECS Transactions
Conference paper