Acid-catalyzed dehydration for the design of chemical amplification resists
- Hiroshi Ito
- R. Sooriyakumaran
- et al.
- 1991
- ACS Spring 1991
Conference paper
Publications
16 results at ACS Spring 1991
Fluorescence spectroscopy and photochemistry of poly(4-tert-butoxycarbonyloxystyrene) triphenylsulfonium salt mixtures
- Nigel P. Hacker
- Kevin M. Welsh
- 1991
- ACS Spring 1991
Conference paperAdvances in organic resist materials
- C.G. Willson
- 1991
- ACS Spring 1991
Conference paperProgress in unzipping polyaldehyde resist systems
- Hiroshi Ito
- 1991
- ACS Spring 1991
Conference paperLithography
- A.D. Wilson
- 1991
- ACS Spring 1991
Conference paperPolymeric nonlinear optoelectronic materials, challenges and opportunities
- R. Tweig
- G.C. Bjorklund
- et al.
- 1991
- ACS Spring 1991
Conference paper