MOVPE on patterned substrates: a new fabrication method for nanometer structure devices
- Yvan D. Galeuchet
- Hugo Rothuizen
- et al.
- 1991
- Microelectronic Engineering
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221 results at Microelectronic Engineering
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- U. Behringer
- W. Haug
- et al.
- 1991
- Microelectronic Engineering
Fabrication of sub-100nm dual-gate MODFETS with enhanced performance
- K.Y. Lee
- K. Ismail
- et al.
- 1991
- Microelectronic Engineering
Laser cleaning of wafer surfaces and lithography masks
- W. Zapka
- A.C. Tam
- et al.
- 1991
- Microelectronic Engineering
Metrology using differential phase contrast microscopy
- Jerry C. Shaw
- 1991
- Microelectronic Engineering
Acid hardenable, spin-coatable silicon ladder polymer systems as resist materials
- Hiroyuki Hiraoka
- Tsuguo Yamaoka
- 1991
- Microelectronic Engineering
Electron beam tester measurements of switching noise in VLSI circuits
- Keith A. Jenkins
- David F. Heidel
- 1991
- Microelectronic Engineering
Periodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- S.J. Wind
- U. Meirav
- et al.
- 1991
- Microelectronic Engineering
Lithographic performance of an EL-3 system at 0.25μm groundrules
- T. Newman
- M.G.R. Thomson
- et al.
- 1991
- Microelectronic Engineering
A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes
- Michael G. Rosenfield
- S. Rishton
- et al.
- 1991
- Microelectronic Engineering