Electron beam tester measurements of switching noise in VLSI circuits
- Keith A. Jenkins
- David F. Heidel
- 1991
- Microelectronic Engineering
Publications
221 results at Microelectronic Engineering
Acid hardenable, spin-coatable silicon ladder polymer systems as resist materials
- Hiroyuki Hiraoka
- Tsuguo Yamaoka
- 1991
- Microelectronic Engineering
Metrology using differential phase contrast microscopy
- Jerry C. Shaw
- 1991
- Microelectronic Engineering
Laser photoetching of doped poly(tetrafluoroethylene), substituted-PTFE, and polyimide films
- Hiroyuki Hiraoka
- Sylvain Lazare
- et al.
- 1991
- Microelectronic Engineering
Fabrication of sub-100nm dual-gate MODFETS with enhanced performance
- K.Y. Lee
- K. Ismail
- et al.
- 1991
- Microelectronic Engineering
Device design issues for a high-performance technology with Si or SiGe epitaxial base
- J.N. Burghartz
- J.D. Cressler
- et al.
- 1991
- Microelectronic Engineering
MOVPE on patterned substrates: a new fabrication method for nanometer structure devices
- Yvan D. Galeuchet
- Hugo Rothuizen
- et al.
- 1991
- Microelectronic Engineering
X-ray mask distortion due to radiation damage
- R.E. Acosta
- 1991
- Microelectronic Engineering
Strain relaxation in GeSi layers with uniform and graded composition
- S.C. Jain
- P. Balk
- et al.
- 1991
- Microelectronic Engineering
Conducting polyaniline: Removable SEM discharge layer
- Marie Angelopoulos
- Jane M. Shaw
- et al.
- 1991
- Microelectronic Engineering