Laser cleaning of wafer surfaces and lithography masks
- W. Zapka
- A.C. Tam
- et al.
- 1991
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
Light scattering properties of x-ray lithography mask substrates
- J.R. Maldonado
- Y. Vladimirsky
- et al.
- 1991
- Microelectronic Engineering
PaperThe electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- U. Behringer
- W. Haug
- et al.
- 1991
- Microelectronic Engineering
PaperFabrication of sub-100nm dual-gate MODFETS with enhanced performance
- K.Y. Lee
- K. Ismail
- et al.
- 1991
- Microelectronic Engineering
PaperMetrology using differential phase contrast microscopy
- Jerry C. Shaw
- 1991
- Microelectronic Engineering
PaperElectron beam tester measurements of switching noise in VLSI circuits
- Keith A. Jenkins
- David F. Heidel
- 1991
- Microelectronic Engineering
PaperConducting polyaniline: Removable SEM discharge layer
- Marie Angelopoulos
- Jane M. Shaw
- et al.
- 1991
- Microelectronic Engineering
PaperLithographic performance of an EL-3 system at 0.25μm groundrules
- T. Newman
- M.G.R. Thomson
- et al.
- 1991
- Microelectronic Engineering
PaperStrain relaxation in GeSi layers with uniform and graded composition
- S.C. Jain
- P. Balk
- et al.
- 1991
- Microelectronic Engineering
PaperPeriodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- S.J. Wind
- U. Meirav
- et al.
- 1991
- Microelectronic Engineering
Paper