Publications

221 results at Microelectronic Engineering

Strain relaxation in GeSi layers with uniform and graded composition
- - S.C. Jain
  - P. Balk
  - et al.
- 1991
- Microelectronic Engineering
Electron beam tester measurements of switching noise in VLSI circuits
- - Keith A. Jenkins
  - David F. Heidel
- 1991
- Microelectronic Engineering
Conducting polyaniline: Removable SEM discharge layer
- - Marie Angelopoulos
  - Jane M. Shaw
  - et al.
- 1991
- Microelectronic Engineering
A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes
- - Michael G. Rosenfield
  - S. Rishton
  - et al.
- 1991
- Microelectronic Engineering
Periodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- - S.J. Wind
  - U. Meirav
  - et al.
- 1991
- Microelectronic Engineering
Lithographic performance of an EL-3 system at 0.25μm groundrules
- - T. Newman
  - M.G.R. Thomson
  - et al.
- 1991
- Microelectronic Engineering
Laser photoetching of doped poly(tetrafluoroethylene), substituted-PTFE, and polyimide films
- - Hiroyuki Hiraoka
  - Sylvain Lazare
  - et al.
- 1991
- Microelectronic Engineering
GaAs opto-electronic integrated circuits for high speed optical communications
- - D.L. Rogers
- 1991
- Microelectronic Engineering
Laser cleaning of wafer surfaces and lithography masks
- - W. Zapka
  - A.C. Tam
  - et al.
- 1991
- Microelectronic Engineering
Comparison of vapor and liquid phase silylation processes of photoresists
- - E. Babich
  - J. Paraszczak
  - et al.
- 1991
- Microelectronic Engineering