Publications

221 results at Microelectronic Engineering

Fabrication of sub-100nm dual-gate MODFETS with enhanced performance
- - K.Y. Lee
  - K. Ismail
  - et al.
- 1991
- Microelectronic Engineering
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- - U. Behringer
  - W. Haug
  - et al.
- 1991
- Microelectronic Engineering
MOVPE on patterned substrates: a new fabrication method for nanometer structure devices
- - Yvan D. Galeuchet
  - Hugo Rothuizen
  - et al.
- 1991
- Microelectronic Engineering
Device design issues for a high-performance technology with Si or SiGe epitaxial base
- - J.N. Burghartz
  - J.D. Cressler
  - et al.
- 1991
- Microelectronic Engineering
Comparison of vapor and liquid phase silylation processes of photoresists
- - E. Babich
  - J. Paraszczak
  - et al.
- 1991
- Microelectronic Engineering
X-ray mask distortion due to radiation damage
- - R.E. Acosta
- 1991
- Microelectronic Engineering
Strain relaxation in GeSi layers with uniform and graded composition
- - S.C. Jain
  - P. Balk
  - et al.
- 1991
- Microelectronic Engineering
Laser photoetching of doped poly(tetrafluoroethylene), substituted-PTFE, and polyimide films
- - Hiroyuki Hiraoka
  - Sylvain Lazare
  - et al.
- 1991
- Microelectronic Engineering
Light scattering properties of x-ray lithography mask substrates
- - J.R. Maldonado
  - Y. Vladimirsky
  - et al.
- 1991
- Microelectronic Engineering
Laser cleaning of wafer surfaces and lithography masks
- - W. Zapka
  - A.C. Tam
  - et al.
- 1991
- Microelectronic Engineering