Using simulation to analyze integrated tool performance in semiconductor manufacturing
- John Mauer
- Roland Schelasin
- 1994
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
High-resolution electron-beam lithography for fabricating visible semiconductor lasers with curved mirrors and integrated holograms
- P. Unger
- V. Boegli
- et al.
- 1994
- Microelectronic Engineering
PaperImproved underlayers for acid amplified resists
- H.S. Sachdev
- R.W. Kwong
- et al.
- 1994
- Microelectronic Engineering
PaperComparison of the sidewall recombination in dry and wet etched InGaAs/InP wires
- B. Jacobs
- H. Zull
- et al.
- 1993
- Microelectronic Engineering
PaperPhotolithography overview for 64 megabit production
- T. Leslie
- W. Arden
- et al.
- 1993
- Microelectronic Engineering
PaperMeasurement of the effective wavelength of x-ray lithography sources
- Juan R. Maldonado
- Inna Babich
- et al.
- 1993
- Microelectronic Engineering
PaperHot-electron dynamics in SiO2 and the degradation of the Si/SiO2-interface
- E. Cartier
- D.J. DiMaria
- 1993
- Microelectronic Engineering
PaperReactive ion etching of InAlAs with Ar/Cl2 mixtures for ridge waveguide lasers
- R. Germann
- S. Hausser
- et al.
- 1993
- Microelectronic Engineering
Paper"Laser cleaning" removes particles from surfaces
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1993
- Microelectronic Engineering
PaperArrayed miniature electron beam columns
- T.H.P. Chang
- L.P. Muray
- et al.
- 1993
- Microelectronic Engineering
Paper