High-resolution electron-beam lithography for fabricating visible semiconductor lasers with curved mirrors and integrated holograms
- P. Unger
- V. Boegli
- et al.
- 1994
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
SEM/EBIC characterization of degradation at mirrors of GaAs/AlGaAs laser diodes
- Abram Jakubowicz
- Albert Oosenbrug
- 1994
- Microelectronic Engineering
PaperUsing simulation to analyze integrated tool performance in semiconductor manufacturing
- John Mauer
- Roland Schelasin
- 1994
- Microelectronic Engineering
PaperLateral down-scaling of selective area MOVPE-grown GaInAs/InP wires and dots
- H. Rothuizen
- P. Roentgen
- et al.
- 1993
- Microelectronic Engineering
PaperPhotolithography overview for 64 megabit production
- T. Leslie
- W. Arden
- et al.
- 1993
- Microelectronic Engineering
PaperFabrication and characterization of compact 100nm scale metal oxide semiconductor field effect transistors
- C. Reeves
- S.J. Wind
- et al.
- 1993
- Microelectronic Engineering
PaperCarbon impurities at a Si-SiO2 interface
- S.I. Raider
- 1993
- Microelectronic Engineering
PaperEarly operating experience with the helios compact synchrotron x-ray source
- D.E. Andrews
- Chas N. Archie
- 1993
- Microelectronic Engineering
PaperComparison of the sidewall recombination in dry and wet etched InGaAs/InP wires
- B. Jacobs
- H. Zull
- et al.
- 1993
- Microelectronic Engineering
PaperNew model of a common origin for trapped holes and anomalous positive charge in MOS capacitors
- Y. Roh
- L.P. Trombetta
- et al.
- 1993
- Microelectronic Engineering
Paper