Publications

221 results at Microelectronic Engineering

Laser stimulated photocathode electron beam prober for 15ps resolution waveform measurements
- - Albert J. Fixl
  - Keith A. Jenkins
- 1994
- Microelectronic Engineering
Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- - R. Viswanathan
  - David Seeger
  - et al.
- 1994
- Microelectronic Engineering
SEM/EBIC characterization of degradation at mirrors of GaAs/AlGaAs laser diodes
- - Abram Jakubowicz
  - Albert Oosenbrug
- 1994
- Microelectronic Engineering
Fabrication and characterization of compact 100nm scale metal oxide semiconductor field effect transistors
- - C. Reeves
  - S.J. Wind
  - et al.
- 1993
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- - T. Leslie
  - W. Arden
  - et al.
- 1993
- Microelectronic Engineering
Measurement of the effective wavelength of x-ray lithography sources
- - Juan R. Maldonado
  - Inna Babich
  - et al.
- 1993
- Microelectronic Engineering
Arrayed miniature electron beam columns
- - T.H.P. Chang
  - L.P. Muray
  - et al.
- 1993
- Microelectronic Engineering
New model of a common origin for trapped holes and anomalous positive charge in MOS capacitors
- - Y. Roh
  - L.P. Trombetta
  - et al.
- 1993
- Microelectronic Engineering
Hot-electron dynamics in SiO₂ and the degradation of the Si/SiO₂-interface
- - E. Cartier
  - D.J. DiMaria
- 1993
- Microelectronic Engineering
Microscopic mechanisms of interface state generation by electrical stress
- - J.H. Stathis
- 1993
- Microelectronic Engineering