X-Ray Damage Considerations in MOSFET Devices
- J.R. Maldonado
- S.S. Iyer
- 2019
- JES
Publications
509 results at JES
Investigation of Reactive-Ion-Etching-Related Fluorocarbon Film Deposition onto Silicon and a New Method for Surface Residue Removal
- G.S. Oehrlein
- J.G. Clabes
- et al.
- 2019
- JES
Copper Corrosion with and without Inhibitors
- V. Brusic
- M.A. Frisch
- et al.
- 2019
- JES
The Polycrystalline-Si Contact to GaAs
- P.D. Kirchner
- J.M. Woodall
- et al.
- 2019
- JES
PtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES
Correlation of Surface Wettability and Corrosion Rate for Benzotriazole-Treated Copper
- Richard R. Thomas
- Vlasta A. Brusic
- et al.
- 2019
- JES
Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
- E. Tierney
- 2019
- JES
low Temperature Silicon Epitaxy by Hot Wall Ultrahigh Vacuum/Low Pressure Chemical Vapor Deposition Techniques: Surface Optimization
- B.S. Meyerson
- E. Ganin
- et al.
- 2019
- JES
Measurement of Thin-Film Dissolution Kinetics using a Quartz Crystal Microbalance
- W.D. Hinsberg
- C.G. Willson
- et al.
- 2019
- JES
Dependence of the Flatband Voltage of Si-MOS on Distribution of Cesium in SiO2 Comparison of Two Implantation Methods
- L. Krusin-Elbaum
- 2019
- JES