Publications

509 results at JES

Optimization of Electrodeposit Uniformity by the Use of Auxiliary Electrodes
- - S. Mehdizadeh
  - J. Dukovic
  - et al.
- 2019
- JES
Paper
Interaction Between ti and SiO₂
- - C.-Y. Ting
  - M. Wittmer
  - et al.
- 2019
- JES
Paper
Simulation of Leveling in Electrodeposition
- - John O. Dukovic
  - Charles W. Tobias
- 2019
- JES
Paper
An XPS and TEM Study of Intrinsic Adhesion Between Polyimide and Cr Films
- - N.J. Chou
  - D.W. Dong
  - et al.
- 2019
- JES
Paper
Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF₄/O₂ Etching of Silicon
- - M. Dalvie
  - K.F. Jensen
- 2019
- JES
Paper
Kinetics of Oxygen Gas Evolution on Hydrous Rhodium Oxide Films
- - Eugene J.M. O'Sullivan
  - Laurence D. Burke
- 2019
- JES
Paper
A Novel Scheme for Detection of Defects in III-V Semiconductors by Cathodoluminescence
- - Larry M. Glassman
  - Martin P. Scott
- 2019
- JES
Paper
Phosphorus-Doped Polycrystalline Silicon via LPCVD: I. Process Characterization
- - B.S. Meyerson
  - W.L. Olbricht
- 2019
- JES
Paper
The Effect of Cyanide on the Oxidation of Formaldehyde on Au, Cu, and Pd Electrodes
- - Jean Horkans
- 2019
- JES
Paper
A new process using two photo-masks to prepare trilayer thin film transistors
- - Yue Kuo
- 2019
- JES
Paper