S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Paper
A new process using two photo-masks to prepare trilayer thin film transistors
Abstract
No abstract available.
Related
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting