Micromechanics: A toolbox for femtoscale science: "Towards a laboratory on a tip"
- R. Berger
- Ch. Gerber
- et al.
- 1997
- Microelectronic Engineering
Publications
Date
Featured collections
Popular topics
221 results at Microelectronic Engineering
Magnetic tunnel junctions fabricated at tenth-micron dimensions by electron beam lithography
- S. Rishton
- Y. Lu
- et al.
- 1997
- Microelectronic Engineering
Reliability and integration of ultra-thin gate dielectrics for advanced CMOS
- D.A. Buchanan
- S.H. Lo
- 1997
- Microelectronic Engineering
Light emission during direct and Fowler-Nordheim tunneling in ultra thin MOS tunnel junctions
- E. Cartier
- J.C. Tsang
- et al.
- 1997
- Microelectronic Engineering
Defect instability in ultra-thin oxides on silicon
- L. Xie
- K.R. Farmer
- et al.
- 1997
- Microelectronic Engineering
Submicrometer p-Type SiGe modulation-doped field-effect transistors for high speed applications
- I. Adesida
- M. Arafa
- et al.
- 1997
- Microelectronic Engineering
A new positive DUV photoresist optimized for 0.25 μm isolated lines
- T. Lindsay
- G.G. Barclay
- et al.
- 1997
- Microelectronic Engineering
Microcolumn based low energy e-beam writing
- C. Stebler
- M. Despont
- et al.
- 1996
- Microelectronic Engineering
Electron beam technology - SEM to microcolumn
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1996
- Microelectronic Engineering
The nanoworld: Chances and challenges
- Heinrich Rohrer
- 1996
- Microelectronic Engineering