Publications

221 results at Microelectronic Engineering

Low temperature Al-Cu planarization by PVD Al-Cu-Ge alloys (Invited lecture)
- - R.V. Joshi
- 1997
- Microelectronic Engineering
Reliability and integration of ultra-thin gate dielectrics for advanced CMOS
- - D.A. Buchanan
  - S.H. Lo
- 1997
- Microelectronic Engineering
Light emission during direct and Fowler-Nordheim tunneling in ultra thin MOS tunnel junctions
- - E. Cartier
  - J.C. Tsang
  - et al.
- 1997
- Microelectronic Engineering
Quantitative model of the thickness dependence of breakdown in ultra-thin oxides
- - J.H. Stathis
- 1997
- Microelectronic Engineering
On the relationship between stress induced leakage currents and catastrophic breakdown in ultra-thin SiO₂ based dielectrics
- - D.A. Buchanan
  - J.H. Stathis
  - et al.
- 1997
- Microelectronic Engineering
Explanation for the oxide thickness dependence of breakdown characteristics of metal-oxide-semiconductor structures
- - D.J. Dimaria
- 1997
- Microelectronic Engineering
An MOS transistor with Schottky source/drain contacts and a self-aligned low-resistance T-gate
- - S. Rishton
  - K. Ismail
  - et al.
- 1997
- Microelectronic Engineering
Electron-beam microcolumn fabrication and testing
- - M. Despont
  - U. Staufer
  - et al.
- 1996
- Microelectronic Engineering
The nanoworld: Chances and challenges
- - Heinrich Rohrer
- 1996
- Microelectronic Engineering
Electron beam technology - SEM to microcolumn
- - T.H.P. Chang
  - M.G.R. Thomson
  - et al.
- 1996
- Microelectronic Engineering