Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- L.M. Ephrarh
- D.J. Dimaria
- et al.
- 2019
- JES
Paper
Publications
509 results at JES
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- E.A. Irene
- N.J. Chou
- et al.
- 2019
- JES
PaperThe Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon
- E. Bassous
- E.F. Baran
- 2019
- JES
PaperInfluence of the Growth Conditions of Al2O3 Passivating Layers on the Corrosion of Aluminum Films in Water
- J. Grimblot
- J.M. Eldridge
- 2019
- JES
PaperThe Defect Structure of ZnSe:Ga
- A. Ray
- F.A. Kröger
- 2019
- JES
PaperAn Explanation of the Electrochromism of Lutetium Diphthalocyanine
- G.A. Corker
- B. Grant
- et al.
- 2019
- JES
PaperEtching Silicon with Fluorine Gas
- M. Chen
- V.J. Minkiewicz
- et al.
- 2019
- JES
PaperElectrochemical Test to Evaluate Passivation Layers: Overcoats of Si in Ink
- M.H. Lee
- J.M. Eldridge
- et al.
- 2019
- JES
PaperHigh Temperature Flow Resistance of Micron Sized Images in AZ Resists
- H. Hiraoka
- J. Pacansky
- 2019
- JES
PaperPredicting Radiation Sensitivity of Polymers
- C.G. Willson
- K. Kinoshita
- 2019
- JES
Paper