Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Paper
Preparation and Characterization of Ruthenium Dioxide Crystals
Abstract
A study was made of the growth and characterization of ruthenium dioxide single crystals. The optimum conditions for the growth of sound crystals by the transport and oxidation of ruthenium metal are given. The relationship of the growth conditions to crystal habit, stoichiometry, lattice constant, and resistivity is discussed. Thermal expansion data are presented. © 1979, The Electrochemical Society, Inc. All rights reserved.
Related
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures