Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
No abstract available.
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings