Residual Stress, Chemical Etch Rate, Refractive Index, and Density Measurements on SiO2 Films Prepared Using High Pressure Oxygen
- E.A. Irene
- D.W. Dong
- et al.
- 2019
- JES
Paper
Publications
35 results for D.W. Dong
Ellipsometry Measurements of Polycrystalline Silicon Films
- E.A. Irene
- D.W. Dong
- 2019
- JES
PaperOn the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- E.A. Irene
- N.J. Chou
- et al.
- 2019
- JES
PaperSilicon Oxidation Studies: The Oxidation of Heavily B- and P-Doped Single Crystal Silicon
- E.A. Irene
- D.W. Dong
- 2019
- JES
PaperDirect Evidence for 1 nm Pores in “Dry” Thermal SiO2 from High Resolution Transmission Electron Microscopy
- J.M. Gibson
- D.W. Dong
- 2019
- JES
PaperPreparation and Some Properties of Chemically Vapor-Deposited Si-Rich SiO and Si3N4 Films
- D.W. Dong
- E.A. Irene
- et al.
- 2019
- JES
PaperSilicon Oxidation Studies: Morphological Aspects of the Oxidation of Polycrystalline Silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES
PaperAn XPS and TEM Study of Intrinsic Adhesion Between Polyimide and Cr Films
- N.J. Chou
- D.W. Dong
- et al.
- 2019
- JES
PaperObservation of amorphous silicon regions in silicon-rich silicon dioxide films
- A. Hartstein
- J.C. Tsang
- et al.
- 2008
- Applied Physics Letters
PaperDual electron injector structure
- D.J. Dimaria
- D.W. Dong
- 2008
- Applied Physics Letters
Paper