Electron-Optical Masking of Semiconductor Structures
- Richard F. M. Thornley
- Michael Hatzakis
- et al.
- 1970
- IEEE T-ED
Publications
3 results for Richard F. M. Thornley
Electron Beam Exposure of Photoresists
- R.F.M. Thornley
- T. Sun
- 1965
- JES
Electron Beam Recording of Digital Information
- R.F.M. Thornley
- A.V. Brown
- et al.
- 1964
- IEEE Transactions on Electronic Computers