David B. Mitzi
Journal of Materials Chemistry
Paper
Electron Beam Exposure of Photoresists
Abstract
No abstract available.
Related
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
J. Tersoff
Applied Surface Science