Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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ACS Macro Letters
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Ronald Troutman
Synthetic Metals