Publications

61 results for E. Spiller

Copolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists
- - Ivan Haller
  - Ralph Feder
  - et al.
- 2019
- JES
Specimen replication for electron microscopy using x rays and x-ray resist
- - Ralph Feder
  - David Sayre
  - et al.
- 2008
- Journal of Applied Physics
Application of synchrotron radiation to x-ray lithography
- - E. Spiller
  - D.E. Eastman
  - et al.
- 2008
- Journal of Applied Physics
Smooth multilayer films suitable for x-ray mirrors
- - Rolf-Peter Haelbich
  - Armin Segmüller
  - et al.
- 2008
- Applied Physics Letters
Controlled fabrication of multilayer soft-x-ray mirrors
- - Eberhard Spiller
  - Armin Segmüller
  - et al.
- 2008
- Applied Physics Letters
X‐ray lithography
- - R. Feder
  - E. Spiller
  - et al.
- 2004
- Polymer Engineering & Science
Saturable optical resonator
- - Eberhard Spiller
- 2003
- Journal of Applied Physics
Low-loss reflection coatings using absorbing materials
- - Eberhard Spiller
- 2003
- Applied Physics Letters
Propagation of X rays in waveguides
- - Eberhard Spiller
  - Armin Segmüller
- 2003
- Applied Physics Letters
Spectral characteristics of multilayer cobalt - carbon mirrors for the λ ≈ 7.5 nm range
- - N.N. Kolachevskiǐ
  - E. Louis
  - et al.
- 1997
- Quantum Electronics