J. Patrick Henry, Eberhard Spiller, et al.
Applied Physics Letters
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
J. Patrick Henry, Eberhard Spiller, et al.
Applied Physics Letters
Eberhard Spiller
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Sharon R. Jelinsky, Barry Welsh, et al.
Proceedings of SPIE 1989
Eberhard Spiller, Leon Golub
Applied Optics