Conference paper
Soft x-ray optics 1971-1981, a personal history
Eberhard Spiller
SPIE San Diego 1991
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
Eberhard Spiller
SPIE San Diego 1991
Janos Kirz, Harald Ade, et al.
Physica Scripta
Ralph Feder, Veronica Banton, et al.
Science
Eberhard Spiller, Armin Segmüller, et al.
Applied Physics Letters