Publications

19 results for R.L. Van Meirhaeghe

Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)
- - K. De Keyser
  - C. Van Bockstael
  - et al.
- 2010
- Applied Physics Letters
Texture of cobalt germanides on Ge(100) and Ge(111) and its influence on the formation temperature
- - K. De Keyser
  - R.L. Van Meirhaeghe
  - et al.
- 2010
- JES
In situ X-ray diffraction study of thin film Ir/Si solid state reactions
- - W. Knaepen
  - J. Demeulemeester
  - et al.
- 2010
- Microelectronic Engineering
In situ study of the formation of silicide phases in amorphous Co-Si mixed layers
- - C. Van Bockstael
  - K. De Keyser
  - et al.
- 2010
- Microelectronic Engineering
In situ x-ray diffraction study of Ni-Yb interlayer and alloy systems on Si(100)
- - W. Knaepen
  - J. Demeulemeester
  - et al.
- 2009
- JVSTA
In situ study of the formation of silicide phases in amorphous Ni-Si mixed layers
- - C. Van Bockstael
  - C. Detavernier
  - et al.
- 2009
- Journal of Applied Physics
In situ x-ray diffraction study of metal induced crystallization of amorphous germanium
- - W. Knaepen
  - S. Gaudet
  - et al.
- 2009
- Journal of Applied Physics
Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films
- - C. Van Bockstael
  - K. De Keyser
  - et al.
- 2009
- Applied Physics Letters
Formation and stability of NiSi in the presence of Co and Fe alloying elements
- - D. Deduytsche
  - C. Detavernier
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Effect of Pt addition on growth stress and thermal stress of NiSi films
- - C. Van Bockstael
  - K. De Keyser
  - et al.
- 2008
- Journal of Applied Physics