Publications

11 results for K. Torii

Statistical measurement of random telegraph noise and its impact in scaled-down high-κ/metal-gate MOSFETs
- - H. Miki
  - N. Tega
  - et al.
- 2012
- IEDM 2012
Voltage and temperature dependence of random telegraph noise in highly scaled HKMG ETSOI nFETs and its impact on logic delay uncertainty
- - H. Miki
  - M. Yamaoka
  - et al.
- 2012
- VLSI Technology 2012
Evaluation methodology for random telegraph noise effects in SRAM arrays
- - M. Yamaoka
  - Hiroshi Miki
  - et al.
- 2011
- IEDM 2011
Understanding short-term BTI behavior through comprehensive observation of gate-voltage dependence of RTN in highly scaled high-κ / metal-gate pFETs
- - Hiroshi Miki
  - M. Yamaoka
  - et al.
- 2011
- VLSI Technology 2011
Impact of HK / MG stacks and future device scaling on RTN
- - Naoki Tega
  - Hiroshi Miki
  - et al.
- 2011
- IRPS 2011
Critical dimension scanning electron microscope local overlay measurement and its application for double patterning of complex shapes
- - Shoji Hotta
  - Takumichi Sutani
  - et al.
- 2011
- J. Micro/Nanolithogr. MEMS MOEMS
Spatial signature in local overlay measurements - "what CD-SEM can tell us and optical measurements can not"
- - Scott Halle
  - Daniel Moore
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Hysteretic drain-current behavior due to random telegraph noise in scaled-down FETs with high-κ/metal-gate stacks
- - Hiroshi Miki
  - Naoki Tega
  - et al.
- 2010
- IEDM 2010
CD-SEM metrology of spike detection on sub-40 nm contact holes
- - Yoshinori Momonoi
  - Taro Osabe
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Reduction of random telegraph noise in high-κ / metal-gate stacks for 22 nm generation FETs
- - N. Tega
  - H. Miki
  - et al.
- 2009
- IEDM 2009