Publications

23 results for Greg McIntyre

Learning from native defects on EUV mask blanks
- - Emily Gallagher
  - Alfred Wagner
  - et al.
- 2014
- SPIE Optics + Photonics 2014
Clear sub-resolution assist features for EUV
- - Martin Burkhardt
  - Greg McIntyre
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Enabling reverse tone imaging for via levels using attenuated Phase Shift Mask and source optimization
- - Bassem Hamieh
  - Hyun Chol Choi
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Enhancing resolution with pupil filtering for projection printing systems with fixed or restricted illumination angular distribution
- - Greg McIntyre
  - Leon Teeuwen
  - et al.
- 2013
- SPIE Advanced Lithography 2013
The trade-offs between thin and thick absorbers for EUV photomasks
- - Gregory McIntyre
  - Christian Zuniga
  - et al.
- 2011
- SPIE Photomask Technology + EUV Lithography 2011
Qualification, monitoring, and integration into a production environment of the world's first fully programmable illuminator
- - Gregory McIntyre
  - Daniel Corliss
  - et al.
- 2011
- SPIE Advanced Lithography 2011
EUV OPC for 56 nm metal pitch
- - Martin Burkhardt
  - Matt Colburn
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Understanding the trade-offs of thinner binary mask absorbers
- - Jaione Tirapu-Azpiroz
  - Gregory McIntyre
  - et al.
- 2010
- SPIE Photomask Technology + EUV Lithography 2010
Resist-based polarization monitoring with phase-shift masks at 1.35 numerical aperture: Tool-to-tool comparison
- - Gregory McIntyre
  - Richard Tu
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations
- - David Melville
  - Alan E. Rosenbluth
  - et al.
- 2010
- SPIE Advanced Lithography 2010