Customization and design of directed self-assembly using hybrid prepatterns
- Joy Y. Cheng
- Gregory S. Doerk
- et al.
- 2015
- SPIE Advanced Lithography 2015
Publications
8 results for Gregory S. Doerk
Enabling complex nanoscale pattern customization using directed self-assembly
- Gregory S. Doerk
- Joy Y. Cheng
- et al.
- 2014
- Nature Communications
Computational lithography platform for 193i-guided directed self-assembly
- Kafai Lai
- Melih Ozlem
- et al.
- 2014
- SPIE Advanced Lithography 2014
Computational aspects of optical lithography extension by Directed Self-Assembly
- Kafai Lai
- Chi-Chun Liu
- et al.
- 2013
- SPIE Advanced Lithography 2013
Deterministically isolated gratings through the directed self-assembly of block copolymers
- Gregory Sadasdf Doerk
- Joy Y. Cheng
- et al.
- 2013
- SPIE Advanced Lithography 2013
Pattern placement accuracy in block copolymer directed self-assembly based on chemical epitaxy
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- ACS Nano
Measurement of placement error between self-assembled polymer patterns and guiding chemical prepatterns
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- SPIE Advanced Lithography 2012
Micellar block copolymer templated galvanic displacement for epitaxial nanowire device integration
- Gregory S. Doerk
- Charles Dhong
- et al.
- 2011
- Journal of Materials Chemistry