Fundamental study of extreme UV resist line edge roughness: Characterization, experiment, and modeling
- Ramakrishnan Ayothi
- Lovejeet Singh
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Paper
Publications
64 results for Jed Pitera
Broad-spectrum antimicrobial supramolecular assemblies with distinctive size and shape
- Kazuki Fukushima
- Jeremy P. K. Tan
- et al.
- 2012
- ACS Nano
PaperOn the use of experimental observations to bias simulated ensembles
- Jed W. Pitera
- John D. Chodera
- 2012
- JCTC
PaperComputer modeling of water and salt transport in RO membrane active layers
- Jed W. Pitera
- Young-Hye Na
- et al.
- 2012
- NSTI-Nanotech 2012
Conference paperProgress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy
- Chi-Chun Liu
- Jed Pitera
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperMeasurement of placement error between self-assembled polymer patterns and guiding chemical prepatterns
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperReducing lambda repressor to the core
- Maxim B. Prigozhin
- Krishnarjun Sarkar
- et al.
- 2011
- Journal of Physical Chemistry B
PaperDirected self-assembly on sparse chemical patterns for lithographic applications
- Joy Y. Cheng
- Alshakim Nelson
- et al.
- 2009
- J. Photopolym. Sci. Tech.
PaperDirected self-assembly of lamellar microdomains of block copolymers using topographic guiding patterns
- Sang-Min Park
- Charles T. Rettner
- et al.
- 2009
- Macromolecules
PaperOil fields, hedge funds, and drugs
- Patrick Groeneveld
- Rob A. Rutenbar
- et al.
- 2009
- DAC 2009
Conference paper