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Joseph S. Newbury- M. Guillorn
- J. Chang
- et al.
- 2009
- IEDM 2009
- S.W. Bedell
- N. Daval
- et al.
- 2009
- ECS Meeting 2009
- M. Guillorn
- J. Chang
- et al.
- 2008
- VLSI Technology 2008
- C. D'Emic
- J.S. Newbury
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- Bruce Doris
- Y.-H. Kim
- et al.
- 2005
- VLSI Technology 2005
- Huiling Shang
- J. Rubino
- et al.
- 2005
- VLSI Technology 2005