Resistivity of copper interconnects at 28 nm pitch and copper cross-sectional area below 100 nm2
- Adam Pyzyna
- Hsinyu Tsai
- et al.
- 2017
- IITC 2017
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89 results for Robert L. Bruce
A silicon metamaterial chip-to-chip coupler for photonic flip-chip applications
- Tymon Barwicz
- Swetha Kamlapurkar
- et al.
- 2017
- OFC 2017
DSA patterning options for logics and memory applications
- Chi Chun Liu
- Elliott Franke
- et al.
- 2017
- SPIE Advanced Lithography 2017
Unexpected impact of RIE gases on lithographic films
- Martin Glodde
- Robert L. Bruce
- et al.
- 2017
- SPIE Advanced Lithography 2017
Directed self-assembly patterning strategies for phase change memory applications
- Robert L. Bruce
- Gloria Fraczak
- et al.
- 2017
- SPIE Advanced Lithography 2017
A metamaterial converter centered at 1490nm for interfacing standard fibers to nanophotonic waveguides
- Tymon Barwicz
- Nicolas Boyer
- et al.
- 2016
- OFC 2016
A Double-Data-Rate 2 (DDR2) Interface Phase-Change Memory with 533MB/s Read-Write Data Rate and 37.5ns Access Latency for Memory-Type Storage Class Memory Applications
- H. Lung
- C. Miller
- et al.
- 2016
- IMW 2016
Evaluation of ALE processes for patterning
- J. M. Papalia
- Nathan Marchack
- et al.
- 2016
- SPIE Advanced Lithography 2016
A novel self-converging write scheme for 2-bits/cell phase change memory for Storage Class Memory (SCM) application
- W. Chien
- Yung-Han Ho
- et al.
- 2015
- VLSI Technology 2015
Resistivity of copper interconnects beyond the 7 nm node
- Adam Pyzyna
- Robert L. Bruce
- et al.
- 2015
- VLSI Technology 2015