Publications

11 results for Yiping Yao

Healthcare Wearable Sensors Adhesion to Human Fingernails and Toenails
- - Katsuyuki Sakuma
  - Leanna Pancoast
  - et al.
- 2023
- Micromachines
Leveraging sub-E0 dose assessment methodology to improve EUV lithography cluster dose performance
- - Chris Robinson
  - Cody Murray
  - et al.
- 2020
- SPIE Advanced Lithography 2020
Inorganic hardmask development for extreme ultraviolet patterning
- - Anuja De Silva
  - A. Dutta
  - et al.
- 2019
- J. Micro/Nanolithogr. MEMS MOEMS
Inorganic hardmask development for EUV patterning
- - Anuja De Silva
  - A. Dutta
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Low hydrogen silicon carbon nitride cap for high performance sub-10 nm Cu-low k interconnect
- - Son Van Nguyen
  - Shobha Hosadugra
  - et al.
- 2017
- ECS Meeting 2017 - New Orleans
Low hydrogen silicon carbon nitride cap for high performance sub-10 nm Cu-low k interconnect
- - Son Van Nguyen
  - Shobha Hosadugra
  - et al.
- 2017
- ECS J. Solid State Sci. Technol.
Development of TiO₂ containing hardmasks through plasma-enhanced atomic layer deposition
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS
Development of TiO₂ containing hardmasks through PEALD deposition
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Study of alternate hardmasks for extreme ultraviolet patterning
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2016
- JVSTB
Atomic layer deposition of sidewall spacers: Process, equipment and integration challenges in state-of-the-art logic technologies
- - Michael Belyansky
  - Richard Conti
  - et al.
- 2014
- ECS Meeting 2014