Stress gradients observed in Cu thin films induced by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2011
- Journal of Materials Research
Paper
Publications
21 results for C. Witt
A quantitative analysis of room temperature recrystallization kinetics in electroplated copper films using high resolution x-ray diffraction
- Andrew Ying
- Christian Witt
- et al.
- 2011
- Journal of Applied Physics
PaperCopper microstructure: Effect on electromigration void evolution
- C. Witt
- V. Calero
- et al.
- 2010
- ADMETA 2010
Conference paperEffect of impurity on Cu electromigration
- C.-K. Hu
- Matthew Angyal
- et al.
- 2010
- International Workshop STRESS-INDUCED PHENOMENA IN METALLIZATION 2010
Conference paperIn situ evolution of stress gradients in Cu films induced by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2010
- Applied Physics Letters
PaperNew failure mechanism during high temperature storage testing and its application on SIV risk evaluation
- O. Aubel
- W. Yao
- et al.
- 2009
- IIRW 2009
Conference paperThe evolution of barrier properties during reliability testing of Cu interconnects
- M.A. Meyer
- O. Aubel
- et al.
- 2008
- International Workshop on Stress-Induced Phenomena in Metallization 2008
Workshop paperStress relaxation in Cu thin films
- C. Witt
- R. Rosenberg
- et al.
- 2008
- International Workshop on Stress-Induced Phenomena in Metallization 2008
Workshop paperStress gradients observed in Cu thin films induced by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2009
- MRS Spring Meeting 2009
Conference paperStress gradients induced in Cu films by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2008
- Applied Physics Letters
Paper