Effect of hot carrier stress on device junctions measured by electron holography and scanning capacitance microscopy
- Yun-Yu Wang
- J. Nxumalo
- et al.
- 2018
- Applied Physics Letters
Publications
22 results for Yun-Yu Wang
Junction profiling on hot carrier stressed device by dual lens electron holography and scanning capacitance microscopy
- Yun-Yu Wang
- J. Nxumalo
- et al.
- 2018
- IWJT 2018
Characterizing junction profiles in Ge photodetectors using scanning capacitance microscopy (SCM) and electron holography
- J. Nxumalo
- Yun-Yu Wang
- et al.
- 2018
- IWJT 2018
Quantification of local strain distributions in nanoscale strained SiGe FinFET structures
- Shogo Mochizuki
- Conal E. Murray
- et al.
- 2017
- Journal of Applied Physics
High-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffraction
- David Cooper
- N. Bernier
- et al.
- 2017
- Applied Physics Letters
Study of phosphorus doped Si:C films formed by in situ doped Si epitaxy and implantation process for n-type metal-oxide-semiconductor devices
- Shogo Mochizuki
- Rainer Loesing
- et al.
- 2017
- JVSTB
Nanoscale strain distributions in embedded SiGe semiconductor devices revealed by precession electron diffraction and dual lens dark field electron holography
- Yun-Yu Wang
- David Cooper
- et al.
- 2015
- Applied Physics Letters
Dual-lens electron holography for junction profiling and strain mapping on semiconductor devices
- Yun-Yu Wang
- Anthony Domenicucci
- et al.
- 2014
- Electronic Device Failure Analysis
Strain mapping of Si devices with stress memorization processing
- Y.Y. Wang
- John Bruley
- et al.
- 2013
- Applied Physics Letters
Variable magnification dual lens electron holography for semiconductor junction profiling and strain mapping
- Y.Y. Wang
- J. Li
- et al.
- 2013
- Ultramicroscopy